High-Speed Tunable Interferometric Spectral Shaper for VCSEL Manufacturing Inspection

Precise control of the oxidation aperture is critical for fabricating oxide-confined VCSELs, as aperture diameter directly affects performance and yield. Conventional optical inspection relies on single-wavelength illumination (often slow or speckle-prone) or broadband light (which struggles with contrast in multilayered structures) [1]–[3]. Systems with arbitrary spectral control offer improved detection but require complex, costly setups, limiting industrial applicability [4].