Silicon-Nitride-Based Integrated Photonics Platform for VIS Spectral Range

Silicon nitride (SiN), along with silicon on insulator (SOI) and indium phosphide, is the third primary photonic platform material. Its advantages include a transparency window extending from the visible to the mid-infrared range, compatibility with CMOS processing, low loss, and the relatively high refractive index contrast of SiN/SiO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> resulting in a small footprint of elements. The distinguishing feature of this platform is the ability to develop circuits operating in the visible part of the spectral range, which has applications in areas such as sensing or life science [1], [2].