3D In-Situ Profiling in a Laser Micromachining Station Using Dual-Comb LiDAR
Laser micromachining process development often involves iterative external measurements, significantly prolonging the process optimization time. We present a dual-comb LiDAR [1] proof of concept coaxial integration into a micro machining station, providing 3D in-situ profiling with sub-micron axial precision. This approach can potentially streamline process optimization, reduce inspection effort, and provide real-time feedback capabilities for improved process control.
Authors
- Lukas Lang (ORCID: https://orcid.org/0000-0003-2201-1547)
- Bojan Resan (ORCID: https://orcid.org/0000-0002-4509-7323)
- Justinas Pupeikis (ORCID: https://orcid.org/0000-0003-4236-7030)
- C. R. Phillips (ORCID: https://orcid.org/0000-0001-5307-153X)
- Armin Stumpp
- Benjamin Willenberg (ORCID: https://orcid.org/0000-0002-6822-951X)
- U. Keller (ORCID: https://orcid.org/0000-0002-1689-8041)
- Hayk Soghomonyan (ORCID: https://orcid.org/0000-0002-7396-9432)
Institutions
- FHNW University of Applied Sciences and Arts Northwestern Switzerland (CH)
- ETH Zurich (CH)
Publication Details
- Published
- 2025-06-23
- DOI
- https://doi.org/10.1109/cleo/europe-eqec65582.2025.11109248
- Primary Topic
- Advanced Fiber Laser Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00