2D Beam Scanning Using Silicon Nitride-Based Optical Phased Array

An optical phased array (OPA) comprises an array of optical antennas, forming and steering a beam through constructive interference of all antennas. This is accomplished by precisely controlling the phase of each antenna using a phase shifter (PS). Integration of OPAs on a silicon nitride (SiN) platform offers distinct advantages, including broad transparency range (400 nm – 6.7 μm), low propagation loss, low thermo-optic coefficient, and ability to handle high power signals. The latter capability is particularly advantageous for applications such as LiDAR, where injection of higher power enables larger range detection [1]–[4]. This work presents an OPA integrated on a SiN platform for two dimensional beam steering applications.