Unlocking Extreme Parallelization: 1 kW Ultrafast Laser Processing with Compensation of Spatio-Temporal Effects for Large Angle Beam Splitting

Recent advances in industrial ultrashort pulse (USP) laser technology have culminated in the development of the 1 kW TruMicro Serie 9000 (Fig. 1a) [1]. Operating at sub-picosecond pulse durations, it delivers up to 10 mJ of pulse energy, enabling high-throughput material processing. Typically, USP processes require moderate fluences for efficient, high-quality outcomes [2]. Diffractive beam splitting [3] will make multi-mJ pulses at kilowatt power usable, distributing the beam into multiple spots to increase throughput significantly. Extended spot lines and dense arrays further enhance productivity by maximizing spot density for localized processing. However, large splitting angles and high spot counts can introduce spatio-temporal distortions [4], degrading beam quality and uniformity. This work shows how extreme parallelization is achieved by combining high-power USP lasers with advanced spatio-temporal compensation. We outline a path toward robust, industrial-scale ultrafast processing, emphasizing carefully optimized diffractive splitting to ensure uniformity and reproducibility at high throughput.