Suspended Waveguides for Mid-Infrared in Silicon Nitride

The technological processes developed for the production of CMOS electronic integrated circuits are an excellent starting point for the optimization of silicon-based photonics integrated circuits fabrication. One of the most promising material platforms that use CMOS technologies is based on silicon nitride (SiN). It is characterized by low signal losses, high optical power tolerance, and a broad spectral range (0.4 - 3.7 μm). It has wide applications e.g., in agrifood and natural resources, high performance computing, health and wellbeing [1], [2].