A Low-Voltage Drive, Piston-motion Micromirror Array with 94% Fill Factor
We present an electrostatically-actuated, piston-motion micromirror array for applications in 3D point scanning and holography. Individual mirror pixels can be controlled with low-voltage analog drive over a 300 nm actuation range and achieve 10–90% mechanical settling times of less than 160 μs. An efficient pixel tiling scheme that allows adjacent mirrors to share the anchors of the suspension structure results in a 94% fill factor for high optical efficiency.
Authors
- Rikky Muller (ORCID: https://orcid.org/0000-0003-3791-1847)
- Laura Waller (ORCID: https://orcid.org/0000-0003-1243-2356)
- Nathan Tessema Ersaro (ORCID: https://orcid.org/0000-0002-4458-4728)
- Leyla Kabuli (ORCID: https://orcid.org/0000-0001-6018-6773)
- Munkyu Kang (ORCID: https://orcid.org/0000-0002-3645-5467)
- Elisabeth A. Murray (ORCID: https://orcid.org/0000-0003-1450-1642)
- Cem Yalcin (ORCID: https://orcid.org/0000-0003-1872-4122)
Institutions
- University of California, Berkeley (US)
Publication Details
- Published
- 2025-07-13
- DOI
- https://doi.org/10.1109/omn65869.2025.11126011
- Citations
- 1
- Primary Topic
- Advanced Optical Imaging Technologies
- Type
- article
- Field-Weighted Citation Impact
- 1.14