Fabrication and Characterization of Transition Metal Dichalcogenide (TMD) Bonding Structures for Nanomechanical Electron Wave Coupling
A micromachined bonding structure to investigate the electron wave coupling across nanomechanical gaps is described. Two silicon substrates with exfoliated transition metal dichalcogenides (TMD) layers are bonded via capillary stiction. Raman spectroscopy measurements through Al<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>O<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf>/SiO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>/TMD membranes replicate the characteristic signatures of TMD layers varying from a monolayer to several molecular thicknesses.Keywords: Transition metal dichalcogenide, WS<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>, nanomechanics, micromachining, Raman spectroscopy, photoluminescence
Authors
- Andrew T. Yan (ORCID: https://orcid.org/0000-0002-2063-7485)
- Alexander McLeod (ORCID: https://orcid.org/0000-0002-5232-634X)
- Tianqi Luo (ORCID: https://orcid.org/0009-0004-4224-1803)
- Joseph J. Talghader
- Nitzan Hirshberg
Institutions
- University of Minnesota (US)
Publication Details
- Published
- 2025-07-13
- DOI
- https://doi.org/10.1109/omn65869.2025.11126007
- Primary Topic
- Mechanical and Optical Resonators
- Type
- article
- Field-Weighted Citation Impact
- 0.00