Photo-Induced Tunable Nanoimprint Lithography Stamps: Proof of Concept
Fabrication of tunable nanoimprint lithography (NIL) stamps and the experimental imprints as substructuring triangular or rectangular mesa, are presented for the first time as a proof of principle. During subsequent imprints, size and shape of stamp structures were actively modified through external stimuli, such as light.
Authors
- Burhan Kaban (ORCID: https://orcid.org/0000-0001-8937-2633)
- Eireen Käkel (ORCID: https://orcid.org/0000-0003-1257-5488)
- J. Lindner
- Thomas Fuhrmann‐Lieker (ORCID: https://orcid.org/0000-0003-3473-534X)
- Hartmut Hillmer (ORCID: https://orcid.org/0000-0001-8228-5895)
- Sekvan Bagatur (ORCID: https://orcid.org/0000-0003-2362-074X)
Institutions
- University of Kassel (DE)
Publication Details
- Published
- 2025-07-13
- DOI
- https://doi.org/10.1109/omn65869.2025.11125934
- Primary Topic
- Nanofabrication and Lithography Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00