A MEMS fast-steering mirror with parallel-plate electrostatic actuation for free-space optical communications
Free-space optical communication (FSO) systems require large-aperture fast steering mirrors with small form factor for inter-satellite laser pointing. In this work, an parallel-plate electrostatic MEMS mirror with a large aperture of 10 mm and a footprint of 22 mm × 22 mm is developed.
Authors
- Huikai Xie (ORCID: https://orcid.org/0000-0002-8393-0021)
- Yingchao Cao
- Qiangxian Qi
- Hua Wang (ORCID: https://orcid.org/0000-0002-3660-4290)
- Shaoyu Zhao (ORCID: https://orcid.org/0000-0002-5813-9959)
- Ying Deng (ORCID: https://orcid.org/0000-0002-5430-4152)
- Sijia Xu
Institutions
- Beijing Institute of Technology (CN)
- Beijing Electronic Science and Technology Institute (CN)
- Beijing Microelectronics Technology Institute (CN)
- Institute of Microelectronics (CN)
Publication Details
- Published
- 2025-07-13
- DOI
- https://doi.org/10.1109/omn65869.2025.11126003
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Natural Science Foundation of China
- National Science and Technology Planning Project