A Multi-level Piezoelectric Unimorph Actuator for Increasing the Scan Range of Tip-Tilt-Piston Micromirrors with High Fill Factor
Two types of tip-tilt-piston (TTP) micromirrors with multi-level piezoelectric unimorph actuators are designed and fabricated. The fill factors of the two micromirrors with a mirror plate of 1.0 mm × 1.0 mm are about 50%. Experiments show that the scan range of the fabricated micromirrors can be greatly enhanced.
Authors
- Wenlong Jiao (ORCID: https://orcid.org/0000-0003-0221-163X)
- Huikai Xie (ORCID: https://orcid.org/0000-0002-8393-0021)
- Yang Xiang (ORCID: https://orcid.org/0000-0001-7435-1194)
- Hao Chen (ORCID: https://orcid.org/0009-0005-1416-0624)
- Ying Deng (ORCID: https://orcid.org/0000-0002-5430-4152)
- Xinyu Ding (ORCID: https://orcid.org/0009-0006-3012-9579)
Institutions
- Beijing Institute of Technology (CN)
- Institute of Microelectronics (CN)
Publication Details
- Published
- 2025-07-13
- DOI
- https://doi.org/10.1109/omn65869.2025.11126002
- Citations
- 1
- Primary Topic
- Piezoelectric Actuators and Control
- Type
- article
- Field-Weighted Citation Impact
- 1.21