Complex 3d Glass Structures by Laser-Assisted Flice Method

Hybrid laser-based methods of glass micromachining enable development of innovative all-in-glass devices with extraordinary features for multiple applications. In this work, we demonstrate the capability of the FLICE method (femto-second laser irradiation followed by chemical etching) to generate complex high-aspect ratio geometries with high spatial resolution and smooth surfaces, that are of great importance for microsystem technology.