Whispering Gallery Modes of CMOS-compatible Si<sub>3</sub>N<sub>4</sub> Microdisk Resonators: A Computational Study for 3D Nanophotonics on a Silicon Substrate
We report Si<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf>N<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</inf> microdisk resonators (MDRs) of wavelength-scale thickness down to 200 nm or ≈0.51(λ/n<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">SiN</inf>). As verified by computational electromagnetics, 2-μm or thicker SiO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> cladding would allow stacking MDRs for 3D nanophotonics on a resistive Si substrate, with their whispering gallery modes not interfered.
Authors
- Wenli Zhou (ORCID: https://orcid.org/0000-0002-6975-2206)
- Sang Lam (ORCID: https://orcid.org/0000-0001-8094-5845)
Institutions
- Xi’an Jiaotong-Liverpool University (CN)
Publication Details
- Published
- 2025-07-13
- DOI
- https://doi.org/10.1109/omn65869.2025.11125999
- Citations
- 2
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 1.46