Applications of MEMS Mirrors in Imaging and Industrial Measurement

MEMS mirrors are devices that scan light beams and have a wide range of applications. The applications of scanning mirrors, which scan a plane perpendicular to the optical axis for diffuse optical imaging, and varifocal mirrors, which scan a beam spot along the optical axis for industrial measurement are presented.

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Published
2025-07-13
DOI
https://doi.org/10.1109/omn65869.2025.11125992
Primary Topic
Advanced MEMS and NEMS Technologies
Type
article
Field-Weighted Citation Impact
0.00

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article

Applications of MEMS Mirrors in Imaging and Industrial Measurement

Kenta Nakazawa
Advanced MEMS and NEMS Technologies
article

Applications of MEMS Mirrors in Imaging and Industrial Measurement

Kenta Nakazawa
article en

Abstract

MEMS mirrors are devices that scan light beams and have a wide range of applications. The applications of scanning mirrors, which scan a plane perpendicular to the optical axis for diffuse optical imaging, and varifocal mirrors, which scan a beam spot along the optical axis for industrial measurement are presented.

Shizuoka University (JP)
Mitutoyo Association for Science and Technology
Openalex Percentile: Top 79%
Advanced MEMS and NEMS Technologies
DOISourceOpenAlex
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Applications of MEMS Mirrors in Imaging and Industrial Measurement — Kenta Nakazawa · (2025) | TGRS Research Map | TGRS