Design and fabrication of a quasi-static staggered vertical comb-drive micromirror
A two-axis electrostatic MEMS micromirror with staggered vertical comb drives has been demonstrated in this work. The staggered vertical combs are formed through a self-aligned micro-assembly method with small misalignment. The fabricated micromirror with an optical aperture of 1 mm can achieve an optical deflection angle of 3.5° at 84 Vdc.
Authors
- Huikai Xie (ORCID: https://orcid.org/0000-0002-8393-0021)
- Yingchao Cao
- Qiangxian Qi
- Hua Wang (ORCID: https://orcid.org/0000-0003-0728-8986)
- Zhen Wang (ORCID: https://orcid.org/0000-0002-9182-4421)
- Ying Deng (ORCID: https://orcid.org/0000-0002-5430-4152)
- Sijia Xu
Institutions
- Beijing Institute of Technology (CN)
- Beijing Electronic Science and Technology Institute (CN)
- Beijing Microelectronics Technology Institute (CN)
- Institute of Microelectronics (CN)
Publication Details
- Published
- 2025-07-13
- DOI
- https://doi.org/10.1109/omn65869.2025.11125991
- Citations
- 1
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.73
Funders
- National Natural Science Foundation of China
- National Science and Technology Planning Project