Information System Design and Modeling: A Case Study on SiC Wafer Manufacturing

Silicon carbide (SiC) is a promising semiconductor material due to its exceptional properties. With the increasing demand for SiC wafers, establishing robust manufacturing processes is vital for efficient production and high-quality products. A comprehensive information system for wafer fabrication has proven valuable in semiconductor manufacturing, enabling effective data management, process optimization, and quality control. This paper presents a novel framework for the model development of an information system for SiC wafer fabrication, aiming to provide industry players with a framework for process guidance and a comprehensive overview of manufacturing operations. The fabrication of SiC wafers is first decomposed into data flow, material flow, and process flow. Primary entities with key attributes are then identified and listed with details. Entity relationships are analyzed and constructed by using the crow's foot model with cardinality study. An overarching model shall be meticulously crafted to cater to information system development within the semiconductor sector, with a particular emphasis on the intricate realm of SiC wafer fabrication.