A Two-Dimensional Photonic Crystal based Sensor for Detection of Minute Displacement Shifts

Proposed work involves design and analysis of, a photonic MEMS based displacement sensor. In this work silicon slab were used to displace in the integrated photonic crystal sensing structure using Finite Different Time Domain Method. Four silicon slab are displaced for 0.1µm in ten incremental steps. Transmission spectrum has been analyzed for each slab. Sensor has shown clear frequency shift of 0.01Hz for each micrometer displacement of slab. Furthermore, to enhance the sensor functionality photonic integrated circuit has been developed and examined for laser output and sensitivity of photonic MEMS based sensors for various applied forces. Using K Layout optical interconnect chip designed to check the feasibility of designed sensor. Sensor has shown remarkable sensitivity of 650nm/RIU. The obtained results validate the sensors precision and future prospect of fabrication.