High-Speed and High-Precision Algorithm for LCCD-Based Triangulation Height Measurement
Abstract To achieve high-speed and high-precision measurements, this study introduces a height measurement system based on LCCD and optical triangulation that utilizes a gray-scale centroid algorithm for sub-pixel positioning. Ultimately, the system achieves a resolution of 10 nm, a repeatability of 15 nm, and a stability of 7.8 nm, by setting up an experimental system in the laboratory.
Authors
- Maoxin Song
- Xuefeng Lei (ORCID: https://orcid.org/0000-0001-5547-7461)
- Xinxin Zhao (ORCID: https://orcid.org/0000-0001-6714-308X)
- Da Kuang (ORCID: https://orcid.org/0000-0003-4136-2975)
- Jin Pyo Hong (ORCID: https://orcid.org/0000-0002-3329-504X)
- Yuheng Chu
- Mingchun Ling
- H. Guan (ORCID: https://orcid.org/0009-0006-9758-6459)
Institutions
- University of Science and Technology of China (CN)
- Chinese Academy of Sciences (CN)
- Hefei Institutes of Physical Science (CN)
- Anhui Institute of Optics and Fine Mechanics (CN)
Publication Details
- Journal
- Journal of Physics Conference Series
- Published
- 2025-08-01
- DOI
- https://doi.org/10.1088/1742-6596/3083/1/012008
- Primary Topic
- Satellite Image Processing and Photogrammetry
- Type
- article
- Field-Weighted Citation Impact
- 0.00