High Timing and Spatial Resolution X-Ray Imaging Demonstrated by Direct Coating of Scintillator on a Cmos Spads Array

A CMOS single-photon avalanche diode (SPAD) array integrated with a scintillator has garnered significant interest for portable, high-spatial-resolution X-ray imaging. In this work, we demonstrate high timing resolution in X-ray detection using a CMOS SPAD array, specifically a <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$64 \times 128$</tex> array directly mounted with LuAG and YAG scintillators, tested with a synchrotron X-ray source. Benefiting from the high photon sensitivity of SPADs and the scintillator's light yield, our system has the potential to achieve a photon detection efficiency (PDE) approaching 100%. Furthermore, by aggregating the outputs of multiple pixels, it is capable of detecting low X-ray doses. High spatial resolution imaging is also demonstrated with a larger SPAD array