A MEMS Tunable Metasurface Assisted by the Bound States in the Continuum

This paper reports a bound states in the continuum (BIC) assisted, continuously tunable, and addressable metasurface with a reflection coefficient modulation range of 0.05-0.6 at 0.3THz. By electrostatically controlling the air gap between the cantilever and the bottom structure, the coupling between the quasi-BIC (q-BIC) and dipole modes is dramatically modulated, achieving a larger continuously tunable reflection coefficient than conventional single-mode modulation. It has application potential in wide range of applications such as terahertz wavefront modulation and terahertz communication.