High Sensitivity and Wide Bandwidth in Multi-Mass MEMS Accelerometers
A novel multi-mass MEMS accelerometer architecture was designed to enhance mechanical sensitivity within a wide operational bandwidth. Two devices were developed: one targeting a broader and more challenging bandwidth, and another employing a more conservative bandwidth that consequently yields higher sensitivity. Experimental results show -3 dB bandwidths of 7.48 kHz and 4.62 kHz, with sensitivities of 105.5 mV/g and 224.6 mV/g, respectively. Both devices exhibit mechanical gains up to 24 dB over single-mass devices with the same bandwidth. This approach enables high-performance, multipurpose MEMS accelerometers ideal for autonomous driving applications that require both wide frequency response and high sensitivity.
Authors
- P. T. Valentim (ORCID: https://orcid.org/0000-0003-2455-6129)
- Rosana A. Dias (ORCID: https://orcid.org/0000-0002-3877-0946)
- Nélson Castro (ORCID: https://orcid.org/0000-0003-0648-2285)
- Rui Neves Madeira (ORCID: https://orcid.org/0000-0001-7360-3855)
- Inês S. Garcia (ORCID: https://orcid.org/0000-0002-4605-6961)
- D. Aguiam (ORCID: https://orcid.org/0000-0001-6318-9021)
- Filipe S. Alves (ORCID: https://orcid.org/0000-0002-3439-8235)
- M. Kamran Saleem (ORCID: https://orcid.org/0000-0003-2791-7823)
- Alexandre Correia
- Filipa C. Mota (ORCID: https://orcid.org/0009-0003-8990-8145)
Institutions
- Robert Bosch (United States) (US)
- International Iberian Nanotechnology Laboratory (PT)
Publication Details
- Published
- 2025-06-29
- DOI
- https://doi.org/10.1109/transducers61432.2025.11110523
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00