MEMS Inertial Sensors for Extreme Environments

Emerging applications including hypersonic flights, space explorations and geothermal drilling demand low size, weight and power (SWaP) sensors that can withstand extreme temperatures. Meeting these challenges requires new, innovative micro systems that encompass high-temperature ASIC, highly reliable MEMS sensors, innovative packaging techniques. Drawing from our experience in aircraft engines, turbines and downhole electronics, GE Aerospace Research is working to extend micro systems beyond conventional temperatures and lifetimes. In this paper, we report our work on temperature-hardened silicon-based MEMS gyroscopes which can withstand harsh conditions including demonstrated 600°C functionality, proven sub-deg/hour bias performance at 300°C with 2400+ hours life, and >4-year storage at 300°C without degradation.