A Novel Multimode Chainring-Shaped Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array for Bandwidth Extension
In this study, we introduce a novel Piezoelectric Micromachined Ultrasonic Transducer (PMUT) structure that leverages multimode vibration to significantly expand bandwidth at high frequencies. The research presents a unique “chainring”-shaped PMUT cell configuration, and an array design engineered to minimize crosstalk. Verified by simulation, the proposed design demonstrated a fractional bandwidth exceeding 100%, centered at 6 MHz. The design was fabricated and validated with experiments.
Authors
- Jérémy Streque (ORCID: https://orcid.org/0000-0003-2989-6173)
- Alessandro Stuart Savoia (ORCID: https://orcid.org/0000-0002-1111-7437)
- Tingzhong Xu (ORCID: https://orcid.org/0000-0001-8193-0223)
- Zhou Da
- Jiapeng Xu
Institutions
- Roma Tre University (IT)
- Silicon Austria Labs (Austria) (AT)
Publication Details
- Published
- 2025-06-29
- DOI
- https://doi.org/10.1109/transducers61432.2025.11109700
- Citations
- 1
- Primary Topic
- Engineering Applied Research
- Type
- article
- Field-Weighted Citation Impact
- 0.95
Funders
- European Commission