A CMOS-MEMS Neural Recording System Based on In-Situ Integration of CMOS Chips on Neural Probe

Brain-computer interface based on high integration neural signal recording system is an important part of brain science research. This paper reports a highly integrated 64-channel CMOS-MEMS neural recording system that directly integrates CMOS chips and MEMS silicon probes. The high-density integration of silicon probes, CMOS chips, and peripheral circuits has been achieved through the utilization of the MEMS metal patterning process, wire-bonding techniques, and surface-mount technology (SMT), resulting in a highly integrated system that is smaller (7 mm × 7 mm) and lighter (0.2 g) than traditional structures. The neural signal is digitized at the base of the probe and has strong anti-noise ability. This microsystem is conducive to long-term service in vivo and is of great significance to brain science research.