Wafer-Scale Waveguide Platform on Thin Film Lithium Niobate
We develop photolithography assisted chemo-mechanical etching (PLACE) and apply it for fabricating PICs on TFLN, ranging from low-loss optical delay lines and photonic neural network to EO tunable lasers and high-power waveguide amplifiers.
Authors
- Ya Cheng (ORCID: https://orcid.org/0000-0001-8269-5907)
Institutions
- Shanghai Institute of Optics and Fine Mechanics (CN)
Publication Details
- Published
- 2025-06-29
- DOI
- https://doi.org/10.23919/oecc/psc62146.2025.11110225
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00