Large-Angle Scanning and Enhanced Robustness Piezoelectric Biaxial MEMS Mirrors Based on Double Circular-Arc Design
MEMS mirrors are widely applied in LiDAR, but often face the risk of fracture when undergoing large deformations. This paper presents a double circular-arc beam design with a compact structure and enhanced robustness. The mirror achieves an ultra-large optical scanning angle of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$81.3^{\circ}\times 71.8^{\circ}$</tex>, featuring a large optical aperture of 5 mm and a resonance frequency exceeding 1.2 kHz. The MEMS mirror has withstood the vehicle-level 1500 g shock for automotive LiDAR application. In addition to the double-circular-arc beam design, the ultra-large scanning angle and high reliability of the MEMS mirror are also achieved through the improved non-Bosch process, which enables smooth sidewall profiles.
Authors
- Xingwang Zhu (ORCID: https://orcid.org/0000-0003-4936-967X)
- Yongquan Su (ORCID: https://orcid.org/0000-0002-1116-8373)
- Hao Chen (ORCID: https://orcid.org/0000-0002-0393-6045)
- Lihao Wang (ORCID: https://orcid.org/0000-0001-5457-2045)
- Zhenyu Wu (ORCID: https://orcid.org/0000-0002-0025-3521)
- Hao Huang (ORCID: https://orcid.org/0000-0003-0456-3962)
- Yang Wang (ORCID: https://orcid.org/0000-0002-0688-0550)
- Yichen Liu (ORCID: https://orcid.org/0000-0002-6681-5582)
Institutions
- State Key Laboratory of Transducer Technology (CN)
- Shanghai Industrial Technology Institute (CN)
- Shanghai Institute of Microsystem and Information Technology (CN)
Publication Details
- Published
- 2025-06-29
- DOI
- https://doi.org/10.1109/transducers61432.2025.11110410
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Key Research and Development Program of China