Low-Voltage Millimeter-Scale Liquid Micropump Using a PZT Thin-Film Diaphragm Actuator for a 3D-Stacked Fluid Sensor System
We developed an <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$8.0\times 5.9\ \text{mm}^{2}$</tex> low-voltage piezoelectric valve micropump using a thin-film <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{Pb}(\text{Zr}, \text{Ti})\mathrm{O}_{3}$</tex> (PZT) diaphragm actuator fabricated by 3D integration technology with UV-laser-patterned thermosetting bonding films. The proposed micropump achieves (1) a high flow rate of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$20.47 \ \mu \mathrm{L}/\min$</tex> at 20 V at 14.56 kHz with ethanol, (2) low-temperature fabrication of less than 180°C, and (3) availability for 3D-integration for ultra-small fluid sensor systems.
Authors
- Sucheta Gorwadkar
- Ryo Oda (ORCID: https://orcid.org/0009-0009-3075-3103)
- Yasuyuki Yamamoto (ORCID: https://orcid.org/0000-0002-9588-2522)
- Tomoya Muramoto
- Takeshi Kobayashi (ORCID: https://orcid.org/0000-0002-4823-1567)
- Hironao Okada
- Rihachiro Nakashima (ORCID: https://orcid.org/0009-0004-4458-8034)
- Yusuke Takei (ORCID: https://orcid.org/0000-0002-0572-7300)
- Kei Ohara (ORCID: https://orcid.org/0009-0003-2518-3069)
- Yuki Okamoto
Institutions
- National Institute of Advanced Industrial Science and Technology (JP)
Publication Details
- Published
- 2025-06-29
- DOI
- https://doi.org/10.1109/transducers61432.2025.11109807
- Primary Topic
- Electrowetting and Microfluidic Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Japan Society for the Promotion of Science