Miniaturized Piezoresistive Intracranial Pressure Sensor with Peninsula-Island-Beam Membrane
The paper reports a miniaturized piezoresistive intracranial pressure (ICP) sensor with a novel ‘peninsula-island - beam’ membrane structure. Utilizing a Wheatstone full-bridge configuration, the ICP sensor achieves a higher sensitivity than normal flat membrane by 35% and better accuracy. Based on Micro Electro Mechanical System (MEMS) technology, the chip with a dimension of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$1100 \mu \mathrm{m}\times 300\mu \mathrm{m}\times 200\mu \mathrm{m}$</tex> has been successfully fabricated. After measurement, the ICP sensor reaches a high sensitivity of up to <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$112 \mu \mathrm{V}/\mathrm{V}/\text{kPa}$</tex> and an excellent accuracy better than 0.4%FS (Full Scale).
Authors
- Yi Gao (ORCID: https://orcid.org/0000-0001-5560-7836)
- Shuaiyi Li (ORCID: https://orcid.org/0009-0008-0896-9189)
- Lihong Fan (ORCID: https://orcid.org/0000-0002-8864-6732)
- Ping Yang (ORCID: https://orcid.org/0000-0002-6437-2036)
- Yong Xia (ORCID: https://orcid.org/0000-0002-8751-4287)
- Jia Chen (ORCID: https://orcid.org/0000-0001-9649-8154)
- Yang Lü (ORCID: https://orcid.org/0000-0002-9280-2718)
- Libo Zhao (ORCID: https://orcid.org/0000-0001-6101-8173)
- Xiangguang Han (ORCID: https://orcid.org/0000-0003-1409-7600)
- Zeyu Cui
- Shengqi Wang (ORCID: https://orcid.org/0000-0003-0380-5659)
- Cheng Zhang (ORCID: https://orcid.org/0009-0004-9223-5751)
Institutions
- First Affiliated Hospital of Xi'an Jiaotong University (CN)
- CRRC (China) (CN)
- Xi'an Jiaotong University (CN)
Publication Details
- Published
- 2025-06-29
- DOI
- https://doi.org/10.1109/transducers61432.2025.11109197
- Primary Topic
- Atomic and Subatomic Physics Research
- Type
- article
- Field-Weighted Citation Impact
- 0.00