Development of Piezoelectric 1D Scanning Micromirror Using Magnesium as a Structural Layer

This paper introduces the first demonstration of a one-dimensional (1D) piezoelectric scanning micromirror utilizing magnesium (Mg) as a substrate, enabling a significantly lighter device. Laser-micromachined Mg sheets (100 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\mu \mathrm{m}$</tex>- and 200 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\mu \mathrm{m}$</tex>-thick) were assembled with 5 mm-diameter, gold-coated silicon mirror plate and bulk lead zirconate titanate (PZT) plates for actuation. The fabricated devices achieved average maximum optical scan angles of 21 ° and 9.5° at resonance frequencies of 899 Hz and 2,047 Hz, respectively, under 200 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\mathrm{V}_{\mathrm{p}\mathrm{p}}$</tex> drive. Using Mg as the metal substrate enables substantial mass reduction and provides a low shear stress-to-yield strength ratio, which are key factors in the design of high-reliability scanning micromirrors.