Sub-Nanoscale Displacement Measurement by Passive Optics with Elliptically Polarized Reference Light

The use of elliptically polarized reference light significantly simplifies optical non-contact subnanoscale displacement measurement system while maintaining 99.3% measurement linearity over a range from 0.68 to 1.1 nanometers with a resolution of approximately 0.052 nm.

Authors

Masanori Hanawa (ORCID: https://orcid.org/0000-0001-7193-0430)
Yasuhiro Okamura
Ayumi Ito

Institutions

University of Yamanashi (JP)

Publication Details

Published: 2025-06-29
DOI: https://doi.org/10.23919/oecc/psc62146.2025.11110012
Primary Topic: Photonic and Optical Devices
Type: article
Field-Weighted Citation Impact: 0.00

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article

Sub-Nanoscale Displacement Measurement by Passive Optics with Elliptically Polarized Reference Light

Masanori Hanawa, Yasuhiro Okamura, Ayumi Ito

Jun 29, 2025

Photonic and Optical Devices

article

Sub-Nanoscale Displacement Measurement by Passive Optics with Elliptically Polarized Reference Light

Masanori Hanawa, Yasuhiro Okamura, Ayumi Ito

June 29, 2025article en

Abstract

University of Yamanashi (JP)

Affordable and clean energy

Openalex Percentile: Top 80%

Photonic and Optical Devices

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Sub-Nanoscale Displacement Measurement by Passive Optics with Elliptically Polarized Reference Light — Masanori Hanawa, Yasuhiro Okamura, et al. · (2025) | TGRS Research Map | TGRS