Saw Excitation by Solid Flat Electrode on Periodically Polarization Inverted Structure for Novel RF Filter

This paper reports on the new SAW device structure consisting of the periodically polarization structure with a solid flat electrode. The use of solid electrodes in this structure eliminates the problem of high power durability in IDT electrode in conventional SAW devices. Optimum crystal orientation and thickness of the structure were theoretically investigated by FEM simulations. Moreover, the excitation of SAW in the ScAlN polarization structure was experimentally demonstrated.