Correction of Waveguide Device Characteristics Based on Process Data
We propose a fabrication method that uses process data to correct the characteristics of optical devices. The manufacturing variation in the center transmission wavelength of silica-based AWG multiplexers can be suppressed to <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\sigma<0.027-n m$</tex>.
Authors
- Ai Yanagihara (ORCID: https://orcid.org/0000-0002-5740-372X)
- Suzuki Kenya (ORCID: https://orcid.org/0009-0000-9388-5909)
- Osamu Moriwaki (ORCID: https://orcid.org/0009-0009-2209-0178)
- Keita Yamaguchi (ORCID: https://orcid.org/0009-0000-8621-2933)
- Masashi Ota (ORCID: https://orcid.org/0009-0005-4075-0206)
Institutions
- NTT (Japan) (JP)
Publication Details
- Published
- 2025-06-29
- DOI
- https://doi.org/10.23919/oecc/psc62146.2025.11110607
- Primary Topic
- Industrial Technology and Control Systems
- Type
- article
- Field-Weighted Citation Impact
- 0.00