Fabrication of 100 Nm-Thick Horizontal Slot Waveguides Using Niobium-Pentoxide for Sensing Devices

We analyzed and fabricated Nb<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>O<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</inf> horizontal waveguides with 100 nm-thick hollow slot regions. Also, about 100 nm-thick hollow slot structures in horizontal slot waveguides were obtained in fabricated devices.

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Published
2025-06-29
DOI
https://doi.org/10.23919/oecc/psc62146.2025.11111252
Primary Topic
Photonic and Optical Devices
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article
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article

Fabrication of 100 Nm-Thick Horizontal Slot Waveguides Using Niobium-Pentoxide for Sensing Devices

Katsumi Nakatsuhara, Nao Suzuki, Yoshiki Hayama, Umi Endo
Photonic and Optical Devices
article

Fabrication of 100 Nm-Thick Horizontal Slot Waveguides Using Niobium-Pentoxide for Sensing Devices

Katsumi Nakatsuhara, Nao Suzuki, Yoshiki Hayama, Umi Endo
article en

Abstract

We analyzed and fabricated Nb<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>O<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</inf> horizontal waveguides with 100 nm-thick hollow slot regions. Also, about 100 nm-thick hollow slot structures in horizontal slot waveguides were obtained in fabricated devices.

Kanagawa Institute of Technology (JP)
Affordable and clean energy
Openalex Percentile: Top 80%
Photonic and Optical Devices
DOISourceOpenAlex
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Fabrication of 100 Nm-Thick Horizontal Slot Waveguides Using Niobium-Pentoxide for Sensing Devices — Katsumi Nakatsuhara, Nao Suzuki, et al. · (2025) | TGRS Research Map | TGRS