Beyond 100 GHz, High Responsivity, Waveguide-Coupled Deeply Recessed Germanium on Silicon Photodiode
In this work, we report a waveguide deeply recessed Ge/Si photodiode achieving a 3-dB bandwidth of 106 GHz at −2 V along with a high O -band responsivity value of 0.93 A/W.
Authors
- Roger Loo (ORCID: https://orcid.org/0000-0003-3513-6058)
- Maumita Chakrabarti (ORCID: https://orcid.org/0000-0003-4584-0399)
- Hakim Kobbi
- Marta Agati (ORCID: https://orcid.org/0000-0002-2108-4800)
- Amir Shahin (ORCID: https://orcid.org/0000-0001-5307-2225)
- Dries Van Thourhout (ORCID: https://orcid.org/0000-0003-0111-431X)
- Minkyu Kim (ORCID: https://orcid.org/0000-0002-8999-2303)
- Mathias Berciano (ORCID: https://orcid.org/0000-0003-0428-7005)
- Patrick Carolan (ORCID: https://orcid.org/0000-0001-5931-3093)
- Filippo Ferraro (ORCID: https://orcid.org/0000-0002-9328-5548)
- Conor Coughlan (ORCID: https://orcid.org/0000-0002-6372-3076)
- Shuchi Kaushik (ORCID: https://orcid.org/0000-0002-1927-7945)
- Peter Verheyen (ORCID: https://orcid.org/0000-0002-8245-9442)
- Didit Yudistira (ORCID: https://orcid.org/0000-0003-1440-5407)
- Joris Van Campenhout (ORCID: https://orcid.org/0000-0003-0778-2669)
- Yoojin Ban (ORCID: https://orcid.org/0000-0001-7319-8132)
Institutions
- IMEC (BE)
Publication Details
- Published
- 2025-06-29
- DOI
- https://doi.org/10.23919/oecc/psc62146.2025.11111517
- Citations
- 1
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.73
Funders
- Key Digital Technologies Joint Undertaking
- European Commission
- Horizon 2020 Framework Programme