CMOS-Compatible Strategy for Trans-Scale Structures via Optically Programmable Self-Assembly

Current light-controlled micro-nano patterning strategies struggle with CMOS compatibility and industrial repeatability. We introduce a CMOS-compatible mechanical self-assembly approach, utilizing high-resolution light-controlled soft-constraint boundaries and surface instability. This enables precise trans-scale patterning (5–1000 μm), controlled morphology, and dynamic structures. Additionally, the highly ordered patterns serve as dynamic optical gratings for gas detection. This work advances programmable patterning and supports surface-functional device development.