Parylene-Encapsulated Self-Healing Metal Interconnects Using Silicone Oil Dispersion

We have achieved in self-healing metal interconnects with parylene encapsulation of individual interconnects using oil-repellent patterning and spin coating of silicone oil with copper nanoparticles. We also demonstrated that self-healing is possible after encapsulating with parylene using low-volatility silicone oil as the dispersion medium and copper nanoparticles as the particles. This result can contribute greatly to the realization of expandable and contractible metal interconnections.