A Mems Acetone Gas Sensor Based on Zno Nanopine Forests with Low Power Consumption

In this study, an acetone gas sensor using ZnO nanopine forests (NPFs) as the sensing material is presented. Densely and uniformly distributed ZnO NPFs are fabricated for the first time on a suspended MEMS micro-heater. Due to the large surface area of the ZnO NPFs, effective interaction between acetone molecules and oxygen ions takes place thus a high response of the sensor to acetone gases with a concentration as low as 10 ppm is achieved. In addition, since the micro-heater is suspended on a super-thin membrane, the power consumption of the device is only 84 mW when an operating temperature of 180°C is reached. Furthermore, with a linear response and high gas selectivity, such a sensor is expected to find applications in health screening and gas leak detection.