Nonlinear MEMS Resonator Based Programmable Pressure Switch

This work presents a novel vacuum gauge designed for ultra-high vacuum environments by exploiting the nonlinear dynamics of a micro-electromechanical systems (MEMS) double-clamped beam resonator. Traditional MEMS resonant pressure sensors face a critical limitation: their operational range is confined to pressures ≤1 Torr, primarily due to the loss of linear damping and measurable quality (Q) factors in high vacuum conditions. To address this, our design leverages the jump-behavior of a nonlinear resonator, where abrupt transitions in vibrational states occur as pressure crosses a threshold. By modulating the vibration amplitude and frequency, The designed sensor achieves a sensitivity of 34 Hz/Torr in < 1 Torr high-vacuum pressure conditions. The nonlinear regime avoids electrostatic pull-in instability, enabling stable operation at large oscillation amplitudes. Experimental results validate the effectiveness of the proposed pressure switching mechanism, offering a streamlined approach to pressure monitoring in ultra-high vacuum environments.