Integrated Microlens Array on $6 \times 6$ Arrayed Photodetector with Photomask Alignment-Less Process
We designed an integrated microlens array on a high-speed <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$6 x 6$</tex> photodetector (PD) array to improve sensitivity between PD pixels. We also investigated a <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$4 \mu$</tex> m microlens fabrication method using a thermal reflow process.
Authors
- Takeshi Umezawa (ORCID: https://orcid.org/0000-0001-5972-0377)
- T. Kawanishi
- K. Akahane
- Noritsugu Yamamoto (ORCID: https://orcid.org/0000-0003-3701-7319)
- Y. Ohnuki
Institutions
- Waseda University (JP)
- National Institute of Information and Communications Technology (JP)
Publication Details
- Published
- 2025-06-29
- DOI
- https://doi.org/10.23919/oecc/psc62146.2025.11109077
- Primary Topic
- Advanced optical system design
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Japan Science and Technology Corporation
- Strategic International Collaborative Research Program