A Silicon Resonant Pressure Sensor with 180 MPA Capability for Extreme Environments

This report presents a novel silicon resonant pressure sensor designed for high-pressure environments such as deep-sea and petroleum applications. The pressure sensor detects pressure based on the principle of volume compression sensitivity, ensuring the reliability of the resonator in high-pressure conditions. By leveraging the stress state of the resonator during volume compression, a new force-transmission structure was designed at the anchor points to control the pressure sensitivity of the resonator. Compared with other silicon resonant pressure sensors, this design enables reliable operation at extremely high pressures (up to 180 MPa), making it the highestpressure silicon resonant pressure sensor currently available. The sensor's core structure adopts a dual-resonator design. Since the pressure sensitivities of the two resonators are opposite, differential output not only enhances the pressure sensitivity but also further reduces the influence of temperature sensitivity and other factors. Across the full pressure range, Resonator I exhibits a pressure sensitivity of 60.136 Hz/MPa, while Resonator II has a sensitivity of -58.094 Hz/MPa, both demonstrating excellent linearity (better than 0.999).