An Electrochemical Accelerometer with Over 1K Frequency Bandwidth and High Sensitivity

This paper demonstrates an electrochemical accelerometer including a novel micro-electrolyte chamber structure, which can extend the ion reaction area near the cathode. By optimizing the chip structure, packaging, and mounting design, this approach achieved high sensitivity and high upper cutoff frequency. Bonded thin glass layer is used as dielectric layer in device fabrication, reducing the flow channels length to 20 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\mu\mathrm{m}$</tex>. The accelerometer has achieved a sensitivity of 13622 V/(m/s) and a self-noise performance of −172 dB@10Hz, despite having fewer channels compared with previous work. The upper cutoff frequency of the electrochemical accelerometer is expanded to 1032 Hz, which is about 10 folds enhancement compared with previous work. The proposed device balances wide bandwidth and high sensitivity simultaneously, significantly expanding the practical application domain of electrochemical accelerometers.