Thickness Detection Based on the Wavelength- and Angle-Interrogation of Surface Lattice Resonance
This paper reports an ultrathin film thickness detection method based on the transverse electric (TE) mode surface lattice resonance (SLR) in an all-metal metasurface. The Ab03 thickness can be characterized precisely by wavelength redshifts or resonance angle increments, respectively. The wavelength-interrogation detection limit and sensitivity are 5 nm and 2.16 nm/nm. This angle-interrogation adopts TE SLR mechanism and improved measurement. The angle sensitivity reaches 2.10 ° /nm larger than that of surface plasmon polariton (SPP) over one magnitude. This research paves a momentous step towards multiple channel detection of nanoscale thickness.
Authors
- Liye Li (ORCID: https://orcid.org/0000-0002-1127-706X)
- Yusa Chen
- Yifan Ouyang (ORCID: https://orcid.org/0009-0000-6371-2281)
- Yunhao Cao (ORCID: https://orcid.org/0000-0003-1899-9863)
- Wengang Wu (ORCID: https://orcid.org/0000-0001-5506-9257)
- Hongshun Sun
- Lijun Ma (ORCID: https://orcid.org/0000-0002-7763-7793)
Institutions
- Peking University (CN)
Publication Details
- Published
- 2025-06-29
- DOI
- https://doi.org/10.1109/transducers61432.2025.11109675
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Natural Science Foundation of China
- National Key Research and Development Program of China