Laser Micromachined 3D-Shaped Free-Standing Structures on Flexible Substrate for Thermal Flow Sensor

This paper presents a new approach to fabricating micro-electromechanical systems (MEMS) thermal flow sensors using an integrated fiber laser micromachining process. The patterning and thinning process was achieved in a single step through the proposed digital manufacturing approach. The compact, flexible design allowed sensor mounting on practically any substrate. A free-standing structure with localized thinning minimized thermal mass, enhancing sensitivity and response speed. The proposed method eliminates the need for multi-step conventional microfabrication, offering a cost-effective and scalable solution. Airflow testing validated its potential, establishing it as a promising alternative for sensor fabrication in biomedical airflow applications.