Integrating a MEMS Speaker with a Slot Dipole Antenna: A Wireless and Batteryless Acoustic Transducer

This paper presents the design, fabrication, and test of an Electrostatic MEMS Speaker integrated with a Slot Dipole antenna. The device performs a direct conversion from RF to the mechanical domain, generating acoustic sound waves in response to an amplitude-modulated RF signal. The resulting sound pressure level (SPL) ranges from 52 to 62 dB within a frequency range of 100 Hz to 10 kHz. This innovative approach allows the Speaker to operate entirely wirelessly, with no need of onboard power.