A Closed Loop Near-Zero Stiffness Mems Accelerometer Based on Electrothermal Buckling
This study proposes, for the first time, a closed loop near-zero stiffness micro-electro-mechanical system (MEMS) accelerometer based on electrothermal microbeam buckling. A system-level model was developed to optimize the parameters of proportional-integral-derivative (PID) control. Experimental results demonstrate that closed loop control significantly improves linearity by 41.27% and increases the resonant frequency by 127%. This closed loop control method can be widely applied to various near-zero stiffness MEMS accelerometers, including mechanical anti-spring designs.
Authors
- Zhuoyue Zheng (ORCID: https://orcid.org/0009-0003-5618-8698)
- Hussein Hussein (ORCID: https://orcid.org/0000-0002-8417-3835)
- Michael D. Kraft (ORCID: https://orcid.org/0000-0002-7213-1072)
- Zhijuan Zhu (ORCID: https://orcid.org/0000-0002-1161-6535)
- Tiantian Huang (ORCID: https://orcid.org/0000-0002-0939-8532)
- Chen Wang (ORCID: https://orcid.org/0000-0003-3476-3658)
- Yuan Wang (ORCID: https://orcid.org/0000-0003-1591-6874)
- Yong Ge (ORCID: https://orcid.org/0000-0002-5397-4090)
Institutions
- University of Macau (MO)
- Zhejiang University (CN)
- American University of Beirut (LB)
- KU Leuven (BE)
Publication Details
- Published
- 2025-06-29
- DOI
- https://doi.org/10.1109/transducers61432.2025.11110437
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00