An Ultra-Large Array Silicon Nitride Photonic Chip for Advanced Biochemical Sensing Platforms

A novel silicon nitride photonic chip has been developed to accommodate four distinct wavelengths of visible light. The chip utilizes a two stage beam splitting mechanism and multi-mode interference (MMI) arrays to achieve uniform light distribution across 2048 focused spots over a 0.25 cm<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> area. This transition from point to surface light source is realized with a single layer silicon nitride structure, offering significant advantages in scalability and integration compared to conventional fluorescence detection systems. The proposed system enables efficient multiplexed fluorescence detection for nucleic acid amplification assays, advancing optical biosensing applications in medical and biological diagnostics.