A Resonant Pressure Sensor Based on Wedge-Shaped Comb Excitations
This paper presents a resonant pressure sensor based on electrostatic wedge-shaped comb excitations. which enhanced driving capabilities compared to parallel-plate and flat-shaped comb capacitor structures. The resonator design was optimized based on the air damping principles in high vacuum conditions, to ensure stable operation in wide temperature ranges. These optimizations resulted in higher Q values, better resistance to electrostatic negative stiffness effects, and improved signal-to-noise ratios (SNRs). Experimental results confirm Q factors exceeding 18,000 at room temperature, enabling high-precision pressure measurements with an accuracy of ±0.01 % full scale (FS) across a wide temperature range (-30°C to 135°C) and pressure range (5 kPa to 350 kPa).
Authors
- Dian-Yong Chen (ORCID: https://orcid.org/0000-0002-3906-7531)
- Yulan Lu (ORCID: https://orcid.org/0000-0003-3826-5998)
- Jian Chen (ORCID: https://orcid.org/0000-0003-4612-3279)
- Junbo Wang (ORCID: https://orcid.org/0000-0003-3434-6651)
- Bo Xie
- Nan Li (ORCID: https://orcid.org/0009-0002-7753-912X)
- Wei Jiang (ORCID: https://orcid.org/0009-0006-9195-3393)
Institutions
- Chinese Academy of Sciences (CN)
- State Key Laboratory of Transducer Technology (CN)
- Aerospace Information Research Institute (CN)
Publication Details
- Published
- 2025-06-29
- DOI
- https://doi.org/10.1109/transducers61432.2025.11110009
- Primary Topic
- Mechanical and Optical Resonators
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Natural Science Foundation of China