Lithography-Free Fabrication of Bimorph Nanostructural Chemomechanical Switches for Hydrogen Detection with Near-Zero Standby Power Consumption

This paper presents a contact-based chemo-mechanical switch for hydrogen (H2) sensing with near-zero standby power consumption, which activates only when the H2 concentration exceeds a specific threshold. The sensor features palladium (Pd)/chromium (Cr) bimorph nano-cantilevers fabricated using directional electrospinning and tilted angle deposition, eliminating the need for photolithography. Upon exposure to H2, the Pd layer absorbs the gas and undergoes volumetric expansion, causing the cantilever to bend. This mechanical deformation leads to contact between the structures, forming a conductive path that enables detection of H2 concentrations in the range of 0.5% to 4%. The sensor exhibited a high on/off current ratio exceeding 10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sup> at concentrations above 0.5%, along with a low leakage current of approximately 7 pA in the off state. These results demonstrate the potential of the proposed device for simplified fabrication and energy-efficient H2 leak detection.

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Published
2025-06-29
DOI
https://doi.org/10.1109/transducers61432.2025.11110773
Primary Topic
Mechanical and Optical Resonators
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article
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article

Lithography-Free Fabrication of Bimorph Nanostructural Chemomechanical Switches for Hydrogen Detection with Near-Zero Standby Power Consumption

Daeyeon Koh, Eunhwan Jo, Jongbaeg Kim
Mechanical and Optical Resonators
article

Lithography-Free Fabrication of Bimorph Nanostructural Chemomechanical Switches for Hydrogen Detection with Near-Zero Standby Power Consumption

Daeyeon Koh, Eunhwan Jo, Jongbaeg Kim
article en

Abstract

This paper presents a contact-based chemo-mechanical switch for hydrogen (H2) sensing with near-zero standby power consumption, which activates only when the H2 concentration exceeds a specific threshold. The sensor features palladium (Pd)/chromium (Cr) bimorph nano-cantilevers fabricated using directional electrospinning and tilted angle deposition, eliminating the need for photolithography. Upon exposure to H2, the Pd layer absorbs the gas and undergoes volumetric expansion, causing the cantilever to bend. This mechanical deformation leads to contact between the structures, forming a conductive path that enables detection of H2 concentrations in the range of 0.5% to 4%. The sensor exhibited a high on/off current ratio exceeding 10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sup> at concentrations above 0.5%, along with a low leakage current of approximately 7 pA in the off state. These results demonstrate the potential of the proposed device for simplified fabrication and energy-efficient H2 leak detection.

Kumoh National Institute of Technology (KR), Yonsei University (KR)
Affordable and clean energy
Openalex Percentile: Top 84%
Mechanical and Optical Resonators
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Lithography-Free Fabrication of Bimorph Nanostructural Chemomechanical Switches for Hydrogen Detection with Near-Zero Standby Power Consumption — Daeyeon Koh, Eunhwan Jo, et al. · (2025) | TGRS Research Map | TGRS