A Study on the Photoelectric Effect of A MEMS Resonator at Cryogenic Temperature
In this paper, an investigation concerning a potential photoelectric effect on a MEMS resonator is conducted. In brief, the device operates in different cryogenic temperatures ranging from 210 K to 170 K. By measuring the first two flexure mode frequencies of the resonator and using a mutual calibration method, two conclusions can be drawn: (i) the effect of light on the resonator is not a simple photothermal effect and (ii) the effect of photothermal and photoelectric becomes distinguishable with the temperature decrease. It is the first time to rigorously prove the low-temperature photoelectric effect using two modes of a single MEMS resonator at cryogenic temperature.
Authors
- Yatao Peng (ORCID: https://orcid.org/0000-0002-6978-0282)
- Pui‐In Mak (ORCID: https://orcid.org/0000-0002-3579-8740)
- Yuan Hao Wang (ORCID: https://orcid.org/0000-0003-3814-4520)
- Chen Wang (ORCID: https://orcid.org/0000-0003-3476-3658)
- Yueyang Li (ORCID: https://orcid.org/0000-0002-5489-8747)
- Rui P. Martins (ORCID: https://orcid.org/0000-0003-2821-648X)
- Yi-Wei Lian
Institutions
- University of Macau (MO)
- Micro & Nano Research Institute (CN)
Publication Details
- Published
- 2025-06-29
- DOI
- https://doi.org/10.1109/transducers61432.2025.11110930
- Primary Topic
- Engineering Applied Research
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Universidade de Macau