Enhancing MEMS Performance Through CMOS Integration: The Case of PMUTS

This paper presents the performance and key achievements of a PMUT-on-CMOS platform specifically developed for high-resolution ultrasound systems. The platform integrates pitch-matched PMUT arrays and high-performance single-cell PMUT sensors, enabling advanced imaging and sensing capabilities. Monolithic integration of PMUTs on CMOS front-end electronics significantly boosts receiving sensitivity. These results pave the way for novel applications in non-invasive and miniaturized ultrasound probes, with potential impact in both medical diagnostics and industrial sensing. The paper presents some examples of achievements using the PMUT-on-CMOS platform.